Fabrication of sub-micron period diffraction gratings in self-processing sol-gel glasses

被引：33

作者：

Blanc, D ^{[1
]}

Pelissier, S ^{[1
]}

机构：

[1] Univ St Etienne, CNRS, UMR 5516, Lab TSI, F-42023 St Etienne 2, France

来源：

THIN SOLID FILMS | 2001年 / 384卷 / 02期

关键词：

diffraction gratings; sol-gel glass; surface structure; laser irradiation;

D O I：

10.1016/S0040-6090(00)01813-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrated a single-step method for fabricating sub-micron period surface relief gratings. The process consists of illuminating an acrylate-modified silica-titania sol-gel glass through a phase mask with an excimer laser at 193 nm. Since the material is self-processing, no further etching step is necessary to reveal the smooth sinusoidal profile. A Corrugation period of 0.56 mum and groove depth of 115 nm is reported. The resistance of the gratings to temperature or solvents makes them competitive for various applications in micro-optics. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：251 / 253

页数：3

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