Microstructure and nanoindentation hardness of Ti/TiN multilayered films

被引：68
作者：
Li, TS [1 ]
Li, H [1 ]
Pan, F [1 ]
机构：
[1] Tsing Hua Univ, Dept Mat Sci & Engn, Adv Mat Lab, Beijing 100084, Peoples R China
来源：
SURFACE & COATINGS TECHNOLOGY | 2001年 / 137卷 / 2-3期
关键词：
Ti/TiN multilayers; hardness enhancement; microstructure;
D O I：
10.1016/S0257-8972(00)01096-3
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Ti/TiN multilayered films were deposited by a reactive magnetron sputtering method using a combination of a Ti target and an Ar-N-2 mixture discharge gas. The microstructure and nanoindentation hardness was characterized by various methods. The experimental results indicated that the hardness of multilayered film depends on both the modulation period and the thickness ratio between Ti and TiN layers lambda (Ti/TiN). The hardness was considerably enhanced when the modulation period was in the range 35-60 nm for lambda (Ti/TiN) = 1:1 and it was up to 23 GPa. For lambda (Ti/TiN) = 1:3, the hardness enhancement appears in the films with the modulation period of 20-70 nm. The possible mechanism responsible for the modification of the hardness and periods of films is also discussed. (C) 2001 Elsevier Science B.V. All rights reserved.
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收藏
页码：225 / 229
页数：5
相关论文
共 14 条
[1]   THE MECHANICAL-PROPERTIES OF LAMINATED MICROSCALE COMPOSITES OF AL/AL2O3 [J].
ALPAS, AT ;
EMBURY, JD ;
HARDWICK, DA ;
SPRINGER, RW .
JOURNAL OF MATERIALS SCIENCE, 1990, 25 (03) :1603-1609
[2]  
BAKER SP, 1993, MATER RES SOC SYMP P, V308, P217, DOI 10.1557/PROC-308-217
[3]  
BENPALA M, 2000, J APPL PHYS, V87, P7753
[4]   Wear of PVD Ti/TiN multilayer coatings [J].
Bromark, M ;
Larsson, M ;
Hedenqvist, P ;
Hogmark, S .
SURFACE & COATINGS TECHNOLOGY, 1997, 90 (03) :217-223
[5]   Multilayer coatings for improved performance [J].
Bull, SJ ;
Jones, AM .
SURFACE & COATINGS TECHNOLOGY, 1996, 78 (1-3) :173-184
[6]  
CAHN JW, 1963, ACTA METALL MATER, V11, P1275
[7]   MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS [J].
CHU, X ;
BARNETT, SA .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4403-4411
[8]   MECHANICAL-PROPERTIES AND TRIBOLOGICAL BEHAVIOR OF NANOLAYERED AL/AL2O3 AND TI/TIN COMPOSITES [J].
DING, Y ;
FARHAT, Z ;
NORTHWOOD, DO ;
ALPAS, AT .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :459-467
[9]   GROWTH OF SINGLE-CRYSTAL TIN VN STRAINED-LAYER SUPERLATTICES WITH EXTREMELY HIGH MECHANICAL HARDNESS [J].
HELMERSSON, U ;
TODOROVA, S ;
BARNETT, SA ;
SUNDGREN, JE ;
MARKERT, LC ;
GREENE, JE .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (02) :481-484
[10]   ATTEMPT TO DESIGN A STRONG SOLID [J].
KOEHLER, JS .
PHYSICAL REVIEW B, 1970, 2 (02) :547-&
12