Visualization and damage due to nano-dendrite defects in metal-insulator-metal capacitors

被引：0
|
作者：
Sheng, Lieyi [1 ]
Snyder, Eric [1 ]
Steidley, Shane [1 ]
Sierra, Anna [1 ]
Glines, Eddie [1 ]
机构：
[1] AMI Semicond, Pocatello, ID 83201 USA
来源：
2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL | 2008年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：649 / 650
页数：2
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