Development of a wireless and passive temperature-compensated SAW strain sensor

被引：50
|
作者：
Wang, Wen [1 ,2 ]
Xue, Xufeng [2 ]
Fan, Shuyao [2 ,3 ]
Liu, Mengwei [2 ]
Liang, Yong [2 ]
Lu, Minghui [1 ]
机构：
[1] Nanchang Hangkong Univ, Nanchang 330063, Jiangxi, Peoples R China
[2] Chinese Acad Sci, Inst Acoust, Beijing 100190, Peoples R China
[3] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2020年 / 308卷
基金：
中国国家自然科学基金;
关键词：
Surface acoustic wave; Stain sensor; Wireless and passive; Y-cut 35 degrees X quartz; One-port resonator; ACOUSTIC-WAVE SENSORS; PRESSURE;
D O I：
10.1016/j.sna.2020.112015
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A temperature-compensated surface acoustic wave (SAW) device was developed to build a wireless and passive strain sensor. Y-cut 35 degrees X quartz with perfect temperature stability was employed as the piezoelectric substrate of the sensing device patterned by one-port resonator. Optimization by coupling of modes (COM) model towards sensing chip was conducted to determine the optimal design parameters, which offers lager Q-value. The prepared sensing device by standard photolithographic technique operating at 434MHz was characterized wirelessly. High strain sensitivity, excellent temperature stability, and high resolution were achieved in the wireless measurements. (C) 2020 Elsevier B.V. All rights reserved.
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页数：8
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