Investigation of the metrological characteristics of a scanning probe measuring microscope using TGZ type calibration gratings

被引：7

作者：

Gogolinskii, K. V. ^{[1
]}

Gubskii, K. L. ^{[2
]}

Kuznetsov, A. P. ^{[2
]}

Reshetov, V. N. ^{[2
]}

Maslenikov, I. I. ^{[3
]}

Golubev, S. S. ^{[4
]}

Lysenko, V. G. ^{[4
]}

Rumyantsev, S. I. ^{[4
]}

机构：

[1] Technol Inst Superhard & New Carbon Mat, Troitsk, Russia

[2] Natl Nucl Res Univ Moscow Engn Phys Inst NIYaU MI, Moscow, Russia

[3] Moscow Inst Phys & Technol MFTI, Dolgoprudnyi, Russia

[4] All Russia Res Inst Metrol Serv VNIIMS, Moscow, Russia

来源：

MEASUREMENT TECHNIQUES | 2012年 / 55卷 / 04期

关键词：

scanning probe microscope; three-coordinate heterodyne interferometer; topography; nanometer structures; calibration gratings;

D O I：

10.1007/s11018-012-9972-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The structure and operating principle of the NanoSkan-3Di scanning probe microscope are briefly described. An investigation of the metrological characteristics of this measuring system using linear TGZ-type gratings demonstrated the high level of reproducibility of the measurements and showed that the results agree with the data obtained in a calibration at the PTB (Germany).

引用

页码：400 / 405

页数：6