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Morphology and physical properties of SnO2-based thin films deposited by the pyrosol process from dibutyltindiacetate
被引:19
作者:
Laurent, JM
Smith, A
Smith, DS
Bonnet, JP
Rodriguez-Clemente, R
机构:
[1] ECOLE NATL SUPER CERAM IND, LMCTS, URA 320, CNRS, F-87065 LIMOGES, FRANCE
[2] CSIC, INST CIENCIA MAT BARCELONA, BELLATERRA 08193, SPAIN
关键词:
chemical vapour deposition;
organometallic compounds;
pyrolysis;
tin oxide;
D O I:
10.1016/S0040-6090(96)08962-6
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Tin oxide based thin films were deposited by the pyrosol process from methanol solutions of dibutyltindiacetate (DBTDA) and variable quantities of ammonium fluoride (NH4F). The optical and electrical characteristics of these films are closely linked to the film morphology (surface aspect and preferred orientation), which is strongly influenced by the chemical nature of the tin precursors. DBTDA precursor was chosen because of easy handling. The film crystallites do not present sharp edges which is an advantage for application as a transparent and conducting electrode in a device. When the ratio F/Sn is equal to 25 at.% in the starting solution, the optical transmittance is between 78 and 95%, even for the thicker deposits (1.45 mu m) which exhibit a corresponding sheet resistance of 8.3 Ohm/square.
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页码:145 / 149
页数:5
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