Modeling and Simulation of Cantilever Based RF MEMS Switch

被引：0
|
作者：
George, Raji [1 ]
Kumar, C. R. Suthikshn [2 ]
Gangal, Shashikala A. [1 ,2 ]
机构：
[1] Def Inst Adv Technol, Elect Engn Dept, Pune, Maharashtra, India
[2] Savitribai Phule Pune Univ, Elect Sci Dept, Pune, Maharashtra, India
来源：
SOFT COMPUTING SYSTEMS, ICSCS 2018 | 2018年 / 837卷
关键词：
Cantilever; MEMS; MATLAB; CoventorWare; Pull-in voltage;
D O I：
10.1007/978-981-13-1936-5_82
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
In this paper, Cantilever based RF MEMS switches are designed and simulated for applications in reconfigurable antennas. Due to the low cost and ease of fabrication Cantilever based RF MEMS switch is preferred. The CoventorWare software (FEM) is used for the simulation of the proposed RF MEMS switch. The pull in voltage is calculated using the formulas and analyzed using MATLAB. Based on the analysis of the dependence of these parameters on the geometry of the cantilever, it is designed and simulated using CoventorWare software. Using this software the optimization of the design of the cantilever switch is performed for minimum pull in voltage. The pull in voltage for the proposed design is obtained as 34 V.
引用
收藏
页码：809 / 816
页数：8
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