Analysis of the Thermal Response in Micromachine under the Thermal Shock

The thermal response for given micromachine with the boundary surface exposed to sudden temperature change is studied by deriving an analytical solution of the hyperbolic heat conduction equation. Using the obtained analytical expression, the temperature profiles at the outer surface and interior of the micro beam are evaluated for various thermal relaxation times. The behaviors of hyperbolic heat propagation in micro beam are analyzed and possible anomalies are discussed by comparing the thermal behaviors of Fourier heat conduction.