Phase and space resolved optical emission spectroscopic investigations of an inductively coupled RF plasma using an imaging acousto-optic spectrometer

被引：9

作者：

Kampschulte, T ^{[1
]}

Schulze, J ^{[1
]}

Gans, T ^{[1
]}

Czarnetzki, U ^{[1
]}

Marke, S ^{[1
]}

Wallendorf, T ^{[1
]}

机构：

[1] Ifu Diagnost Syst GmbH, D-09244 Lichtenau, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 200卷 / 1-4期

关键词：

acousto-optic tuneable filter (AOTF); imaging spectroscopy; phase resolved optical emission spectroscopy (PROES); inductively coupled plasma (ICP);

D O I：

10.1016/j.surfcoat.2005.02.138

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel acousto-optic spectrometer (IfU Diagnostic Systems GmbH) for 2-dimensional (2D) optical emission spectroscopy with high spectral resolution has been developed. The spectrometer is based on acousto-optic tuneable filter technology with fast random wavelength access. Measurements for characterisation of the imaging quality, the spatial resolution, and the spectral resolution are presented. The applicability for 2D-space and phase resolved optical emission spectroscopy (2D-PROES) is shown. 2D-PROES has been applied to an inductively coupled plasma with radio frequency excitation at 13.56 MHz. (c) 2005 Published by Elsevier B.V.

引用

收藏

页码：859 / 861

页数：3

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