共 41 条
[2]
BARTON AFM, 1990, CRC HDB POLYM LIQUID
[4]
Brandrup J., 1999, Polymer Handbook, VII
[8]
Exploring the manufacturability of using block copolymers as resist materials in conjunction with advanced lithographic tools
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2007, 25 (06)
:1969-1975
[9]
Daniels C., 1989, POLYM STRUCTURE PROP