Ultraprecision diamond turning of glass with ultrasonic vibration

被引：59

作者：

Gan, J ^{[1
]}

Wang, X ^{[1
]}

Zhou, M ^{[1
]}

Ngoi, B ^{[1
]}

Zhong, Z ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Precis Engn & Nanotechnol Ctr, Singapore 639798, Singapore

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2003年 / 21卷 / 12期

关键词：

brittle-ductile transition; diamond turning; ultrasonic vibration;

D O I：

10.1007/s00170-002-1416-x

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

By applying ultrasonic vibration to a single-crystal diamond tool-tip, ductile machining of fused silica can be achieved even for 2 mum depth of cut. The increase in the critical depth of cut is significant and is a function of the ratio of vibration speed to cutting speed. Surface roughness Ra of 100 nm was obtained for up to 2 mum depth of cut.

引用

页码：952 / 955

页数：4