Performance enhancement of gate-all-around InGaAs nanowire MOSFETs by raised source and drain structure

被引:0
作者
Si, M. [1 ]
Lou, X.
Li, X. [1 ,2 ]
Gu, J. J. [1 ]
Wu, H. [1 ]
Wang, X. [2 ]
Zhang, J. [1 ]
Gordon, R. G.
Ye, P. D. [1 ]
机构
[1] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[2] Harvard Univ, Dept Chem & Biol Chem, Cambridge, MA 02138 USA
来源
2013 71ST ANNUAL DEVICE RESEARCH CONFERENCE (DRC) | 2013年
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:19 / +
页数:2
相关论文
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[1]  
[Anonymous], VLSI S
[2]  
Gu J.J., 2012, IEDM, P663
[3]  
Gu J. J., 2012, ELECT DEV LETT, V33, P967
[4]  
Gu J.J., 2011, IEDM Tech. Dig, P769
[5]   Effects of forming gas anneal on ultrathin InGaAs nanowire metal-oxide-semiconductor field-effect transistors [J].
Si, Mengwei ;
Gu, Jiangjiang J. ;
Wang, Xinwei ;
Shao, Jiayi ;
Li, Xuefei ;
Manfra, Michael J. ;
Gordon, Roy G. ;
Ye, Peide D. .
APPLIED PHYSICS LETTERS, 2013, 102 (09)