Study on writing transmission metal grating with pulse shaping of femtosecond laser

被引：0

作者：

Ni, X. C. ^{[1
]}

Sun, Q. ^{[1
]}

Wang, Ch Y. ^{[1
]}

Yang, L. ^{[1
]}

Wu, Y. Z. ^{[1
]}

Jia, W. ^{[1
]}

Chai, L. ^{[1
]}

机构：

[1] Tianjin Univ Technol & Educ, Dept Elect Engn, Tianjin 300222, Peoples R China

来源：

4TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY (ISIST' 2006) | 2006年 / 48卷

关键词：

D O I：

10.1088/1742-6596/48/1/189

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Pulse shaping in femtosecond(fs) laser micromachining is different from that of traditional laser, whose main purpose is to reduce focal scale size, wipe off fluorescence around laser beam, decrease pulse distortion, and fabricate all kinds of figures. To describe the spatial form of laser pulse around focal scale, the synchronous moving of focal objective and accepting material is presented. When a pinhole mask is placed in front of focal objective, the changing trend of laser spatial form around focal point with the laser beam diameter will be obtained by the diameter changing of the hole mask. Experimental results show that the diameter of laser pulse around focal point trends smoothly when the pinhole diameter is modulated to smaller, even the position of beam waist is changed. These phenomena can be explained by optical imaging theory. Finally, the transmission metal grating is written successfully with a selected parameter.

引用

页码：1011 / 1016

页数：6

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