Advanced concepts for UV laser beam shaping with non-rotationary symmetric optical elements

The potential of non-rotationally symmetric optical elements (NOEs) is demonstrated with respect to mask Projection techniques with UV excimer laser radiation. NOEs are diamond turned mirrors with an almost arbitrary surface shape. The operation principle of the NOEs presented here is the concept of beam integration including beamlet shaping. Efficient and innovative processing is enabled by generating complex beam profiles adapted to the mask apertures demonstrated for the generation an annular shaped beam profile.