Ionizing role played by atomic metastable species in rf plasma modulated by short high current pulsed discharges

被引：0
|
作者：
Diplasu, C
Surmeian, A
Fujita, H
机构：
[1] Inst Atom Phys, INFLPR, R-76900 Bucharest, Romania
[2] Saga Univ, Dept Elect & Elect Engn, Saga 8408502, Japan
来源：
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2005年 / 7卷 / 05期
关键词：
modulated radio-frequency plasma; metastables; pulsed discharges; Langmuir probes;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Langmuir probe measurements were used to demonstrate the ionizing role of atomic metastables in inductively coupled rf plasma modulated by short high current pulsed discharges. Transient plasma generated in gases without metastable levels (H-2) decays much faster than that generated in gases having atomic metastable levels (Xe, Ar and Ne).
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页码：2397 / 2400
页数：4
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