A 10-60-GHz micromachined directional coupler

被引：21

作者：

Robertson, SV ^{[1
]}

Brown, AR ^{[1
]}

Katehi, LPB ^{[1
]}

Rebeiz, GM ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect Engn & Comp Sci, Radiat Lab, Ann Arbor, MI 48109 USA

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1998年 / 46卷 / 11期

基金：

美国国家航空航天局;

关键词：

directional coupler; integrated circuits; membrane; micromachined; millimeter wave;

D O I：

10.1109/22.734498

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 20-dB directional coupler has been designed and fabricated on a thin dielectric membrane using micromachining techniques. The fabrication process is compatible with monolithic microwave integrated-circuit (MMIC) techniques, and the coupler can be integrated into a planar-circuit layout. Design of the asymmetric tapered coupled-line coupler relies on simple quasi-static models and ideal transmission-line theory. The use of membrane technology results in less than 0.5-dB insertion loss in the coupler from 10 to 60 GHz. In addition, a micromachined packaging technique creates a shielded circuit, which is extremely compact and lightweight.

引用

页码：1845 / 1849

页数：5

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