Growth of c-axis orientation ZnO films on polymer substrates by radio-frequency magnetron sputtering

被引：15

作者：

Chen, Kaixin ^{[1
]}

Chiang, Kin Seng ^{[1
]}

Chan, Hau Ping ^{[1
]}

Chu, Pak Lim ^{[2
]}

机构：

[1] City Univ Hong Kong, Dept Elect Engn, Hong Kong, Peoples R China

[2] Cotco Holding Ltd, Hong Kong, Peoples R China

来源：

OPTICAL MATERIALS | 2008年 / 30卷 / 08期

关键词：

zinc oxide; thin films; sputtering; polymer substrate; optical waveguide;

D O I：

10.1016/j.optmat.2007.06.003

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ZnO films with c-axis orientation were deposited successfully on benzocyclobutene (BCB) and highly fluorinated polyether (HFP) substrates by radio-frequency magnetron sputtering. The effects of the sputtering parameters (argon-oxygen gas flow ratio, sputtering power, and sputtering pressure) on the crystalline quality of the ZnO films were investigated by X-ray diffractometry, atomic force microscopy, and scanning electron microscopy. By using optimized sputtering conditions, uniform ZnO films with good c-axis orientation were formed on hard BCB substrates to a thickness as large as 3.0 mu m. The ZnO films formed on soft HFP substrates, however, were always thinner than 1 mu m. In addition, a ZnO/BCB channel optical waveguide was fabricated, which had a propagation loss of 7.3 dB/cm at the wavelength 1550 nm. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：1244 / 1250

页数：7

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