Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry

被引：0

作者：

Gao, Long ^{[1
]}

Wang, Chunhui ^{[1
]}

Ji, Yiqin ^{[2
]}

Li, Yanchao ^{[1
]}

Cong, Haifang ^{[1
]}

Qu, Yang ^{[1
]}

机构：

[1] Harbin Inst Technol, Natl Key Lab Tunable Laser Technol, Harbin 150001, Peoples R China

[2] Tianjin Key Lab Opt Thin Film, Tianjin 300192, Peoples R China

来源：

OPTICAL REVIEW | 2010年 / 17卷 / 06期

基金：

美国国家科学基金会;

关键词：

heterodyne interferometry; balanced detection; heterodyne detection; pseudorandom noise code; REFRACTIVE-INDEX;

D O I：

10.1007/s10043-010-0098-0

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally.

引用

页码：549 / 552

页数：4

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