Optical study of low energy ion-beam-assisted deposited diamond-like carbon films

被引：10

作者：

Chen, ZY ^{[1
]}

Yu, YH ^{[1
]}

Zhao, JP ^{[1
]}

Ren, CX ^{[1
]}

Ding, XZ ^{[1
]}

Shi, TS ^{[1
]}

Liu, XH ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 141卷 / 1-4期

关键词：

diamond-like carbon; optical characterization; ion beam assisted deposition;

D O I：

10.1016/S0168-583X(98)00155-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Diamond-like carbon (DLC) films were prepared on single crystal silicon wafers by low energy ion-beam-assisted deposition (IBAD). The microstructure characteristics, thickness, optical band gap, sp(3) fraction and so on, of these DLC films have been analyzed by infrared reflection, Raman and ultraviolet-visible optical spectroscopy experiments. It was found that the infrared reflectivity of the as-deposited DLC films depends on both the wave number and deposition conditions. The measured infrared reflection spectra were fitted by a Bruggeman effective medium approximation (EMA) method. The calculated spectra coincided very well with the experimental data, and it was demonstrated that the as-deposited DLC films were mainly composed of sp(3) bonded carbon atoms. The Raman spectra showed a broad asymmetric band in the range of 1500-1580 cm(-1), which is a typical characteristic of an amorphous diamond-like structure. The optical band gap of the DLC films was determined to be 0.54-1.0 eV from UV transmittance spectra. (C) 1998 Elsevier Science B.V. All rights reserved.

引用

页码：144 / 147

页数：4

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