[1] North China Elect Power Univ, Key Lab Condit Monitoring & Control Power Plant E, Minist Educ, Beijing 102206, Peoples R China
[2] Karlsruhe Inst Technol, Inst Micro Proc Engn, D-76344 Eggenstein Leopoldshafen, Germany
[3] Karlsruhe Inst Technol, Inst Microstruct Technol, D-76344 Eggenstein Leopoldshafen, Germany