Planar Microwave Resonant Sensors: A Review and Recent Developments

Microwave sensors based on electrically small planar resonant elements are reviewed in this paper. By virtue of the high sensitivity of such resonators to the properties of their surrounding medium, particularly the dielectric constant and the loss factor, these sensors are of special interest (although not exclusive) for dielectric characterization of solids and liquids, and for the measurement of material composition. Several sensing strategies are presented, with special emphasis on differential-mode sensors. The main advantages and limitations of such techniques are discussed, and several prototype examples are reported, mainly including sensors for measuring the dielectric properties of solids, and sensors based on microfluidics (useful for liquid characterization and liquid composition). The proposed sensors have high potential for application in real scenarios (including industrial processes and characterization of biosamples).