Grayscale homogenizers in calcium fluoride

被引：0

作者：

Lawrence, Jeffrey ^{[1
]}

Simmons, Lamarr ^{[1
]}

Stockham, Andrew ^{[1
]}

Smith, John G. ^{[1
]}

Borek, Gregg ^{[1
]}

Cumme, Matthias ^{[2
]}

Kleindienst, Roman ^{[2
]}

Weissbrodt, Peter ^{[2
]}

机构：

[1] MEMS Opt Inc, 205 Import Circle, Huntsville, AL 35806 USA

[2] JENOPTIK Laser Opt Syst GmBH, D-07745 Jena, Germany

来源：

ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS | 2008年 / 6883卷

关键词：

calcium fluoride; etching; grayscale photolithography; microlens arrays; homogenizer; and diffuser;

D O I：

10.1117/12.767531

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Standard UV materials, such as ArF-grade fused silica, have impurities that lead to low transmittance, high absorption, and fluorescence when exposed to high-irradiance. Calcium fluoride (CaF2) on the other hand, is a promising material for use as an optical diffuser for applications at 157nm, 193nm, and 248nm due to its low defect density and high transmission in the deep UV regime. In this paper, we discuss our method for fabricating Gaussian homogenizers in calcium fluoride using a grayscale photolithography process. Refractive microlens array homogenizers and Gaussian homogenizers have been fabricated in CaF2 and tested at 193nm for efficiency and uniformity. Using an excimer laser, uniformity results were obtained for cylindrical lens arrays in tandem and crossed to observe the homogeneity in an imaging configuration and for producing a square output. Efficiency, uniformity, and zero order measurements are provided for the Gaussian homogenizers.

引用

页数：9

共 6 条

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