Fabrication of metal nanowires by atomic force microscopy nanoscratching and lift-off process

被引：100

作者：

Chen, YJ ^{[1
]}

Hsu, JH ^{[1
]}

Lin, HN ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

NANOTECHNOLOGY | 2005年 / 16卷 / 08期

关键词：

D O I：

10.1088/0957-4484/16/8/020

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A convenient method for the fabrication of metal nanowires by a combination of atomic force microscopy nanoscratching on a single-layer resist and lift-off process is reported. Various metal nanowires, including Au, Cu, Ni, Al, and Ti, with widths as small as 50 nm are successfully created. The electrical resistivities of the nanowires have also been obtained and found to be in good agreement with reported results.

引用

页码：1112 / 1115

页数：4

共 28 条

[1] Size and grain-boundary effects of a gold nanowire measured by conducting atomic force microscopy [J].

Bietsch, A ;

Michel, B .

APPLIED PHYSICS LETTERS, 2002, 80 (18) :3346-3348

[2] Lift-off lithography using an atomic force microscope [J].

Bouchiat, V ;

Esteve, D .

APPLIED PHYSICS LETTERS, 1996, 69 (20) :3098-3100

[3] Fabrication of gold nanowires on insulating substrates by field-induced mass transport [J].

Calleja, M ;

Tello, M ;

Anguita, J ;

García, F ;

García, R .

APPLIED PHYSICS LETTERS, 2001, 79 (15) :2471-2473

[4] Size effects in the electrical resistivity of polycrystalline nanowires [J].

Durkan, C ;

Welland, ME .

PHYSICAL REVIEW B, 2000, 61 (20) :14215-14218

[5]

Emsley, 1989, ELEMENTS

[6] Fabrication of metallic nanostructures by atomic force microscopy nanomachining and lift-off process [J].

Hsu, JH ;

Lin, CY ;

Lin, HN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06) :2768-2771

[7] Fabrication of silicon and metal nanowires and dots using mechanical atomic force lithography [J].

Hu, S ;

Hamidi, A ;

Altmeyer, S ;

Koster, T ;

Spangenberg, B ;

Kurz, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (05) :2822-2824

[8] General technique for fabricating large arrays of nanowires [J].

Jorritsma, J ;

Gijs, MAM ;

Kerkhof, JM ;

Stienen, JGH .

NANOTECHNOLOGY, 1996, 7 (03) :263-265

[9] Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing [J].

Klehn, B ;

Kunze, U .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (07) :3897-3903

[10] Molecular detection based on conductance quantization of nanowires [J].

Li, CZ ;

He, HX ;

Bogozi, A ;

Bunch, JS ;

Tao, NJ .

APPLIED PHYSICS LETTERS, 2000, 76 (10) :1333-1335

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