Properties of Multilayer ZnO:Ga/Ag/ZnO:Ga Coatings Applied by Magnetron Sputtering

被引：4

作者：

Solov'ev, A. A. ^{[1
]}

Sochugov, N. S. ^{[1
]}

Oskomov, K. V. ^{[1
]}

Zaharov, N. A. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Strong Current Elect, Siberian Div, Tomsk 634055, Russia

来源：

PROTECTION OF METALS AND PHYSICAL CHEMISTRY OF SURFACES | 2010年 / 46卷 / 04期

基金：

俄罗斯基础研究基金会;

关键词：

LOW-EMISSIVITY COATINGS; SILVER FILMS; THIN-FILMS; LAYER; GROWTH; ZNO; AG;

D O I：

10.1134/S2070205110040088

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

The methods of van der Pau, spectrometry, and atomic force microscopy were used to study the optical and electrophysical properties of multilayer ZnO:Ga/Ag/ZnO:Ga coatings applied by magnetron sputtering. The effect of the thickness of the coating layer was studied with respect to the surface resistance, transparency, and reflection of the multilayer structure in the visible and infrared wavelength ranges. The coating surface morphology and moisture resistance was studied. The ZnO: Ga/Ag/ZnO: Ga coatings were shown to have a high transparency (T = 90%) in the visible range, high reflection coefficient in the IR range (R = 93%), and low surface resistance (R(s) = 4.88 Ohm/sq). The moisture resistance studies showed the highest moisture resistance of ZnO: Ga (25 nm)/Ag (15 nm) /ZnO:Ga (75 nm) coatings, which are not changed by testing and can be used for the effective protection of silver films against degradation.

引用

页码：438 / 443

页数：6

共 16 条

[1] Moisture resistance of the low-emissivity coatings with a layer structure of Al-doped ZnO/Ag/Al-doped ZnO [J].

Ando, E ;

Miyazaki, M .

THIN SOLID FILMS, 2001, 392 (02) :289-293

[2] Sputtered silver-based low-emissivity coatings with high moisture durability [J].

Ando, E ;

Suzuki, S ;

Aomine, N ;

Miyazaki, M ;

Tada, M .

VACUUM, 2000, 59 (2-3) :792-799

[3] The base layer effect on the d.c. conductivity and structure of direct current magnetron sputtered thin films of silver [J].

Arbab, M .

THIN SOLID FILMS, 2001, 381 (01) :15-21

[4] Low-emissivity coating of amorphous diamond-like carbon/Ag-alloy multilayer on glass [J].

Chiba, K ;

Takahashi, T ;

Kageyama, T ;

Oda, H .

APPLIED SURFACE SCIENCE, 2005, 246 (1-3) :48-51

[5] Degradation of Ag and Ag-alloy mirrors sputtered on poly(ethylene terephthalate) substrates under visible light irradiation [J].

Fukuda, S ;

Kawamoto, S ;

Gotoh, Y .

THIN SOLID FILMS, 2003, 442 (1-2) :117-120

[6] Perpendicular giant magnetoresistance of magnetic multilayers [J].

Gijs, MAM ;

Bauer, GEW .

ADVANCES IN PHYSICS, 1997, 46 (3-4) :285-445

[7] NEW FIGURE OF MERIT FOR TRANSPARENT CONDUCTORS [J].

HAACKE, G .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4086-4089

[8] Ion-assisted deposition of silver thin films [J].

Lee, CC ;

Lee, TY ;

Jen, YJ .

THIN SOLID FILMS, 2000, 359 (01) :95-97

[9] Effects of Ag layer and ZnO top layer thicknesses on the physical properties of ZnO/Ag/Zno multilayer system [J].

Mohamed, S. H. .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2008, 69 (10) :2378-2384

[10] High quality transparent conductive ZnO/Ag/ZnO multilayer films deposited at room temperature [J].

Sahu, D. R. ;

Huang, Jow-Lay .

THIN SOLID FILMS, 2006, 515 (03) :876-879

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