A pyrosol process to deposit large-area SnO2:F thin films and its use as a transparent conducting substrate for CdTe solar cells

被引：55

作者：

Veluchamy, P ^{[1
]}

Tsuji, M ^{[1
]}

Nishio, T ^{[1
]}

Aramoto, T ^{[1
]}

Higuchi, H ^{[1
]}

Kumazawa, S ^{[1
]}

Shibutani, S ^{[1
]}

Nakajima, J ^{[1
]}

Arita, T ^{[1
]}

Ohyama, H ^{[1
]}

Hanafusa, A ^{[1
]}

Hibino, T ^{[1
]}

Omura, K ^{[1
]}

机构：

[1] Matsushita Battery Ind Co Ltd, PV R&D Ctr, Moriguchi, Osaka 5708511, Japan

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2001年 / 67卷 / 1-4期

关键词：

transparent conducting oxide films; SnO2; pyrosol technique; CdS/CdTe solar cell; dimethyl tin dichloride;

D O I：

10.1016/S0927-0248(00)00279-8

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Highly transparent, low-resistance SnO2 :F films suitable as a substrate material for thin-film CdS/CdTe solar cells have been developed on 10 x 10, 30 x 60 and 82 x 71cm(2) glass substrates by an ultrasonic spray pyrolysis (pyrosol) process. Dimethyltin dichloride, NH,F and HF dissolved in water served as the source solution. A fine spray of the source solution has been transported using air as a carrier gas onto hot glass plates in a belt furnace maintained at 500-530 degreesC. A very high growth rate of > 15 nm/s and a high throughput of 3 min/glass plate (82 x 71cm(2) size) have been achieved with films showing greater uniformity, low sheet resistance and high optical transmission. Typical films exhibited a thickness of 500 nm, a sheet resistance of 8.1 Omega /sq., a mobility of 43.8 cm(2)/V s and a donor concentration of 3.5 x 10(20) cm(-3). A thin-film CdS/CdTe solar cell fabricated on a 30 x 60 cm(2) SnO2:F transparent conducting substrate exhibited a solar energy conversion efficiency maximum of 14.95% for 1 cm(2) cell and an average efficiency of 14.24% for 178 isolated 1 cm(2) cells. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：179 / 185

页数：7

共 25 条

[11] 15.1% Highly efficient thin film CdS/CdTe solar cell
Kumazawa, S
Shibutani, S
Nishio, T
Aramoto, T
Higuchi, H
Arita, T
Hanafusa, A
Omura, K
Murozono, M
Takakura, H
[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 49 (1-4) : 205 - 212
[12] Effect of nitric-phosphoric acid etches on material properties and back-contact formation of CdTe-based solar cells
Li, XN
Niles, DW
Hasoon, FS
Matson, RJ
Sheldon, P
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (03): : 805 - 809
[13] DEPOSITION OF IN2O3-SNO2 LAYERS ON GLASS SUBSTRATES USING A SPRAYING METHOD
MANIFACIER, JC
FILLARD, JP
BIND, JM
[J]. THIN SOLID FILMS, 1981, 77 (1-3) : 67 - 80
[14] Murakami K, 1996, J AM CERAM SOC, V79, P2557, DOI 10.1111/j.1151-2916.1996.tb09015.x
[15] MUTO R, 1973, REP RES LAB ASAHI GL, V23, P27
[16] Characterization of highly efficient CdTe thin film solar cells by low-temperature photoluminescence
Okamoto, T
Matsuzaki, Y
Amin, N
Yamada, A
Konagai, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (07): : 3894 - 3899
[17] A pyrosol technique to deposit highly transparent, low-resistance SnO2:F thin films from dimethyltin dichloride
Omura, K
Veluchamy, P
Tsuji, M
Nishio, T
Murozono, M
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (06) : 2113 - 2116
[18] OMURA K, 1998, Patent No. 10206575
[19] Electronic and optical properties of fluorine-doped tin oxide films
Rakhshani, AE
Makdisi, Y
Ramazaniyan, HA
[J]. JOURNAL OF APPLIED PHYSICS, 1998, 83 (02) : 1049 - 1057
[20] RELATION BETWEEN SOLUTION CHEMISTRY AND MORPHOLOGY OF SNO2-BASED THIN-FILMS DEPOSITED BY A PYROSOL PROCESS
SMITH, A
LAURENT, JM
SMITH, DS
BONNET, JP
CLEMENTE, RR
[J]. THIN SOLID FILMS, 1995, 266 (01) : 20 - 30

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