Heat treatment effects on the formation of lanthanum-modified lead zirconate titanate thin films

被引：8

作者：

Kandasamy, S. ^{[1
]}

Ghantasala, M. K. ^{[2
]}

Holland, A. ^{[1
]}

Li, Y. X. ^{[3
]}

Bliznyuk, V. ^{[2
]}

Wlodarski, W. ^{[1
]}

Mitchell, A. ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

[2] Western Michigan Univ, Dept Mech & Aeronaut Engn, Kalamazoo, MI 49008 USA

[3] SIC CAS, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

来源：

MATERIALS LETTERS | 2008年 / 62卷 / 03期

关键词：

heat treatment; XRD; SEM; AFM; RBS; thin films; PLZT; pervoskite;

D O I：

10.1016/j.matlet.2007.05.050

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The microstructural and compositional properties of lanthanum-modified lead zirconate titanate (PLZT) thin films deposited on platinum coated Si substrates by RF magnetron sputtering have been studied. The heat treatment processes of substrate heating during deposition and post deposition furnace and rapid thermal annealing were compared as processes for obtaining the desired pervoskite phase. PUT thin films deposited with in-situ substrate heating showed little evidence of micro-cracking. The XRD data obtained showed the formation of pervoskite phase at 550 degrees C and indicated the suppression of the pyrochlore phase for increasing temperatures. The RBS analysis revealed a film thickness of 140 nm and composition of (Pb0.91La0.09)(Zr0.6Ti0.4)O-3. Deposition performed with in-situ substrate heating at 650 degrees C resulted in highly (110) pervoskite orientated thin films with an average grain size around 160 to 200 nm and an RMS roughness of 3 nm. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：370 / 373

页数：4

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