Three-dimensional chemical imaging of embedded nanoparticles using atom probe tomography

被引:17
作者
Kuchibhatla, Satyanarayana V. N. T. [1 ,2 ]
Shutthanandan, V. [1 ]
Prosa, T. J. [3 ]
Adusumilli, P. [1 ,4 ]
Arey, B. [1 ]
Buxbaum, A. [5 ]
Wang, Y. C. [5 ]
Tessner, T. [5 ]
Ulfig, R. [3 ]
Wang, C. M. [1 ]
Thevuthasan, S. [1 ]
机构
[1] Pacific NW Natl Lab, EMSL, Richland, WA 99352 USA
[2] Battelle Sci & Technol India, Pune, MH, India
[3] Cameca Instruments Inc, Madison, WI USA
[4] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[5] FEI Co, Hillsboro, OR USA
关键词
EVAPORATION; MGO;
D O I
10.1088/0957-4484/23/21/215704
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Analysis of nanoparticles is often challenging especially when they are embedded in a matrix. Hence, we have used laser-assisted atom probe tomography (APT) to analyze the Au nanoclusters synthesized in situ using ion-beam implantation in a single crystal MgO matrix. APT analysis along with scanning transmission electron microscopy and energy dispersive spectroscopy (STEM-EDX) indicated that the nanoparticles have an average size similar to 8-12 nm. While it is difficult to analyze the composition of individual nanoparticles using STEM, APT analysis can give three-dimensional compositions of the same. It was shown that the maximum Au concentration in the nanoparticles increases with increasing particle size, with a maximum Au concentration of up to 50%.
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页数:5
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