Controlled topology of block copolymer gate insulators by selective etching of cylindrical microdomains in pentacene organic thin film transistors

被引:33
作者
Jo, Pil Sung [1 ]
Sung, Jinwoo [1 ]
Park, Cheolmin [1 ]
Kim, Eunhye [2 ]
Ryu, Dit Yeol [2 ]
Pyo, Seungmoon [3 ]
Kim, Ho-Cheol [4 ]
Hong, Jae Min [5 ]
机构
[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea
[2] Yonsei Univ, Dept Chem Engn, Seoul 120749, South Korea
[3] Konkuk Univ, Dept Chem, Seoul 143701, South Korea
[4] Almaden Res Ctr, IBM Res Div, San Jose, CA 95120 USA
[5] Korea Inst Sci & Technol, Optoelect Mat Ctr, Seoul 130650, South Korea
关键词
D O I
10.1002/adfm.200701034
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We investigate the effect of surface topology of a block copolymer/neutral surface/SiO2 trilayered gate insulator on the properties of pentacene organic thin film transistor (OTFT) by the controlled etching of self assembled poly(styrene-b-methyl methacrylate) (PS-b-PMMA) block copolymer. The rms roughness of the uppermost block copolymer film directly in contact with pentacenes was systematically controlled from 0.27 nm to approximately 12.5 nm by the selective etching of cylindrical PMMA microdomains hexagonally packed and aligned perpendicular to SiO2 layer with 20 and 38 nm of diameter and periodicity, respectively. Both mobility and On/Off ratio were significantly reduced by more than 3 orders of magnitudes with the film roughness in OTFTs having 60nm thick pentacene active layer. The poor device performance observed with the etched thin film of block copolymer dielectric is attributed to a defective pentacene active layer and the mixed crystalline structure consisting of thin film and bulk phase arising from the massive nucleation of pentacene preferentially at the edge of each cylindrical etched hole.
引用
收藏
页码:1202 / 1211
页数:10
相关论文
共 39 条
[1]  
[Anonymous], APPL PHYS LETT
[2]  
Brandrup J., 1999, Polymer handbook, VII
[3]   Orienting tetracene and pentacene thin films onto friction-transferred poly(tetrafluoroethylene) substrate [J].
Brinkmann, M ;
Graff, S ;
Straupé, C ;
Wittmann, JC ;
Chaumont, C ;
Nuesch, F ;
Aziz, A ;
Schaer, M ;
Zuppiroli, L .
JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (38) :10531-10539
[4]   Organic thin-film transistors with nanocomposite dielectric gate insulator [J].
Chen, FC ;
Chu, CW ;
He, J ;
Yang, Y ;
Lin, JL .
APPLIED PHYSICS LETTERS, 2004, 85 (15) :3295-3297
[5]   The origination and optimization of Si/SiO2 interface roughness and its effect on CMOS performance [J].
Chen, YN ;
Myricks, R ;
Decker, M ;
Liu, J ;
Higashi, GS .
IEEE ELECTRON DEVICE LETTERS, 2003, 24 (05) :295-297
[6]   Small-angle X-ray scattering of polymers [J].
Chu, B ;
Hsiao, BS .
CHEMICAL REVIEWS, 2001, 101 (06) :1727-1761
[7]   Observation of field-effect transistor behavior at self-organized interfaces [J].
Chua, LL ;
Ho, PKH ;
Sirringhaus, H ;
Friend, RH .
ADVANCED MATERIALS, 2004, 16 (18) :1609-+
[8]  
Dimitrakopoulos CD, 2002, ADV MATER, V14, P99, DOI 10.1002/1521-4095(20020116)14:2<99::AID-ADMA99>3.0.CO
[9]  
2-9
[10]   Gate dielectrics for organic field-effect transistors: New opportunities for organic electronics [J].
Facchetti, A ;
Yoon, MH ;
Marks, TJ .
ADVANCED MATERIALS, 2005, 17 (14) :1705-1725