Device level studies of adaptive optics sliding components in microprojectors

Integrated microprojectors are being developed to project a large image on any surface chosen by users. For a laser-based microprojector, a piezo-electric based adaptive optics unit is adopted in the green laser architecture. Nanolubrication of adaptive optics sliding components is needed to reduce friction and for stick-slip motion. Previous studies of the role of lubricant film thickness in nanolubrication of sliding components in adaptive optics have been carried out in an academic, coupon level fashion and need to be carried out on a device level in order to characterize the role of lubricant film thickness in an actual working device. In this paper, the effect that operating temperatures have on lubricant film thickness, adhesive force and coefficient of friction of used devices is investigated. The results and associated mechanisms are presented and compared with previous coupon level tests to show that the proposed AFM measurement techniques can be employed in other micro devices in which adhesion, film thickness, and coefficient of friction measurements are of interest.