Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering

被引：13

作者：

Gil-Rosta, J. ^{[1
]}

Yubero, F. ^{[1
]}

Fernandez, R. ^{[4
]}

Vilajoana, T. ^{[2
]}

Artus, P. ^{[2
]}

Duersteler, J. C. ^{[2
]}

Cotrino, J. ^{[1
]}

Ortega, I ^{[3
]}

Gonzalez-Elipe, A. R. ^{[1
]}

机构：

[1] Univ Seville, CSIC, Inst Ciencia Mat Sevilla, C Amer Vespucio 49, E-41092 Seville, Spain

[2] INDO, Sant Cugat Del Valles 08174, Spain

[3] Univ Seville, CSIC, Ctr Nacl Aceleredadores, E-41092 Seville, Spain

[4] CSIC, Dept Met Phys, Ctr Nacl Invest Met CENIM, E-28040 Madrid, Spain

来源：

OPTICAL MATERIALS EXPRESS | 2011年 / 1卷 / 06期

关键词：

OPTICAL-PROPERTIES; STRUCTURAL-PROPERTIES; COPPER; SPECTROSCOPY; DISPERSION; INTERFACE; GLASSES; XPS;

D O I：

10.1364/OME.1.001100

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Colored semi-transparent Cu-Si oxide thin films have been prepared by reactive magnetron sputtering from a single cathode of copper-silicon composition. Thin films of different composition and optical response were obtained by changing process parameters like the relative amount of copper in the target and the O-2/Ar mixture of the reactive plasma gas. The film characteristics were analyzed by several techniques. Their optical properties (refractive index, absorption coefficient, color) have been correlated with the process parameters used in the film preparation as well as with the film stoichiometry and chemistry. (C) 2011 Optical Society of America

引用

页码：1100 / 1112

页数：13

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