Temperature-Dependent n-Type and p-Type Sensing Behaviors of CuO Nanosheets/MEMS to NO2 Gas

被引：15

作者：

Hou, Jei-Li ^{[1
]}

Hsueh, Ting-Jen ^{[2
]}

机构：

[1] Natl Sci & Technol Museum, Kaohsiung 807, Taiwan

[2] Natl Kaohsiung Univ Sci & Technol, Dept Elect Engn, Kaohsiung 807, Taiwan

来源：

ACS APPLIED ELECTRONIC MATERIALS | 2021年 / 3卷 / 11期

关键词：

CuO; nanosheet (NS); gas sensor; MEMS; SENSORS; GROWTH; OXIDATION; CU2O;

D O I：

10.1021/acsaelm.1c00684

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study uses a micro-electromechanical system (MEMS) structure to fabricate a cupric oxide (CuO) nanosheet (NS) gas sensor. A CuO-NS with a size ranging from 100 to 500 nm is produced by chemical synthesis and ultrasonic wave grinding. The sensor is used to detect 50 ppb of NO2 at various temperatures. The result indicates a temperature-dependent sensing behavior to NO2 in a CuO sensor. It exhibits abnormal n-type behavior at lower temperatures, with a transition to p-type at higher temperatures. The mechanism for this behavior is proposed.

引用

页码：4817 / 4823

页数：7

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