共 40 条
- [2] ABEL S, 1996, THESIS TU KAISERSLAU
- [3] ALLEN DM, 2006, TIMA, P316
- [4] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
- [5] BECKER EW, 1982, NATURWISSENSCHAFTEN, V69, P520, DOI 10.1007/BF00463495
- [8] Mechanical and metallographic characterization of LIGA fabricated nickel and 80%Ni-20%Fe permalloy [J]. MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 : 185 - 190
- [9] DIMITROVA A, 2006, PRAXISBERICHT FH KAI
- [10] EIGENMANN B, 1926, MAT WISS WERKSTOFFTE