Theoretical investigations on the N-polar GaN/AlxGa1-xN/GaN heterostructures: Considering the existence of both two-dimensional hole and electron gases

被引:8
作者
Yan, Junda [1 ]
Wang, Quan [1 ,2 ]
Wang, Xiaoliang [1 ]
Feng, Chun [1 ]
Xiao, Hongling [1 ]
Liu, Shiming [1 ]
Gong, Jiamin [2 ]
Liu, Fengqi [1 ]
Li, Baiquan [3 ]
机构
[1] Chinese Acad Sci, Beijing Key Lab Low Dimens Semicond Mat & Devices, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
[2] Xian Univ Posts & Telecommun, Sch Elect Engn, Xian 710049, Peoples R China
[3] Beijing Huajin Chuangwei Technol Co Ltd, Beijing 100036, Peoples R China
关键词
ALGAN/GAN HEMTS; GAN;
D O I
10.1063/1.4962856
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper, a theoretical study of N-polar GaN/AlxGa1-xN/GaN heterostructures is conducted systematically. The dependence of two-dimensional hole gas (2DHG, at the bottom AlxGa1-xN/GaN interface) and electron gas (2DEG, at the upper GaN/AlxGa1-xN interface) sheet densities on variables, such as GaN top layer thickness, AlxGa1-xN back barrier thickness, and Al content, is investigated. The effect of n-type doping in AlxGa1-xN and delta-doping concentrations in the GaN buffer on 2DHG and 2DEG sheet densities is also presented. For the unintentionally doped structure, the 2DHG-induced electric field E-2DHG provides the only driving force in the 2DEG formation. Thus, in order to get high dense of 2DEG in such heterostructure, 2DEG and 2DHG shall coexist through proper AlxGa1-xN back barrier design. While for intentionally doped structure (with the n-type doped AlxGa1-xN back barrier layer or delta-doped GaN buffer layer), ionized donor-induced electric field E-donor is another driving force for 2DEG. The obtained insight offers indications for the structure design of the N-polar GaN/AlxGa1-xN/GaN high electron mobility transistors. Published by AIP Publishing.
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页数:7
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