Fabrication of Au/Ti TESs for optical photon counting

被引：29

作者：

Portesi, C. ^{[1
]}

Taralli, E. ^{[1
]}

Rocci, R. ^{[1
]}

Rajteri, M. ^{[1
]}

Monticone, E. ^{[1
]}

机构：

[1] INRIM, Natl Inst Metrol Res, I-10128 Turin, Italy

来源：

JOURNAL OF LOW TEMPERATURE PHYSICS | 2008年 / 151卷 / 1-2期

关键词：

photon counting; TESs; superconducting detectors; fabrication;

D O I：

10.1007/s10909-007-9637-x

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High efficiency and negligible dark-count rates of transition-edge sensor (TES) microcalorimeters as single photon detector at telecommunications and optical visible wavelengths make them powerful tools for quantum information and quantum computation. In this work we report details on the fabrication of Au/Ti for photon counting and analyse the effects on the critical temperature and the transition steepness of the structuring process and wiring material. Au/Ti films deposited by electron-beam at substrate temperature lower than 435 K show sharp transition and reproducible T-c . Moreover, we observe that TES with Al wiring are more stable and have better characteristics of TES with Nb wiring. Using 20 micronx20 micron Ti/Au TES single photon detection has been obtained in the UV-visible range.

引用

页码：261 / 265

页数：5

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