Digital Photonic Production along the Lines of Industry 4.0

被引：4
|
作者：
Poprawe, Reinhart [1 ,2 ]
Hinke, Christian [2 ]
Meiners, Wilhelm [1 ]
Eibl, Florian [1 ]
Zarei, Omid [3 ]
Voshage, Maximilian [3 ]
Ziegler, Stephan [3 ]
Schleifenbaum, Johannes Henrich [1 ,3 ]
Gasser, Andres [1 ]
Schopphoven, Thomas [1 ]
Willenborg, Edgar [1 ]
Flemmer, John [1 ]
Weingarten, Christian [1 ]
Finger, J. [1 ]
Reininghaus, M. [1 ]
机构：
[1] Fraunhofer Inst Laser Technol, Steinbachstr 15, D-52074 Aachen, Germany
[2] Rhein Westfal TH Aachen, Laser Technol LLT, Steinbachstr 15, D-52074 Aachen, Germany
[3] Rhein Westfal TH Aachen, DAP, Steinbachstr 15, D-52074 Aachen, Germany
来源：
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXIII | 2018年 / 10519卷
关键词：
LASER-ABLATION; FEMTOSECOND; PULSE; POWER; OPTIMIZATION;
D O I：
10.1117/12.2292316
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：17
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