Characterization of the variation of the material properties in a freestanding inhomogeneous thin film

被引：12
|
作者：
Cao, Xiaoshan [1 ]
Jin, Feng [2 ]
Jeon, Insu [1 ]
机构：
[1] Chonnam Natl Univ, Sch Mech Syst Engn, Kwangju, South Korea
[2] Xi An Jiao Tong Univ, Sch Aerosp, MOE Key Lab Strength & Vibrat, Xian 710049, Peoples R China
来源：
PHYSICS LETTERS A | 2010年 / 375卷 / 02期
关键词：
Lamb wave; Functionally graded material (FGM); Cut-off frequency; Wentzal-Kramers-Brillouin (WKB) method; Material property variation; WAVES;
D O I：
10.1016/j.physleta.2010.11.004
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
This Letter presents a new technique for measuring the variation of the material properties along the thickness in a freestanding inhomogeneous thin film. The analytical results reveal a simple relation between the material properties and the set of cut-off frequencies of Lamb waves. The influence of the graded properties on the variation of cut-off frequencies in three different kinds of models, including artificial FGM model, sub-surface damage model, and nano-porous thin film model, is discussed. These results provide theoretical guidance for characterizing the material property variations of MEMS/NEMS. (C) 2010 Elsevier B.V. All rights reserved.
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页码：220 / 224
页数：5
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