Adhesion and friction issues associated with reliable operation of MEMS

被引：66
作者：
Maboudian, R [1 ]
机构：
[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA
来源：
MRS BULLETIN | 1998年 / 23卷 / 06期
关键词：
D O I：
10.1557/S0883769400030633
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：47 / 51
页数：5
相关论文
共 25 条
[1]  
ALLEY RL, 1993, P 7 INT C SOL STAT S, P288
[2]  
[Anonymous], 1988, EL DEV M 1988 IEDM 8
[3]  
Chau K. H., 1995, P 8 INT C SOL STAT S, P593
[4]   PERFORMANCE IMPACT OF MONOLAYER COATING OF POLYSILICON MICROMOTORS [J].
DENG, K ;
COLLINS, RJ ;
MEHREGANY, M ;
SUKENIK, CN .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (04) :1278-1285
[5]  
DENG K, 1995, I EL EL ENG MICR EL
[6]   Lubrication of digital micromirror devices™ [J].
Henck, Steven A. .
TRIBOLOGY LETTERS, 1997, 3 (03) :239-247
[7]   Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces [J].
Houston, MR ;
Howe, RT ;
Maboudian, R .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) :3474-3483
[8]  
HOUSTON MR, 1996, P IEEE SOL STAT SENS, P42
[9]   SURFACE MICROMACHINING FOR MICROSENSORS AND MICROACTUATORS [J].
HOWE, RT .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06) :1809-1813
[10]  
Israelachvili J., 1985, Intermolecular and Surface Forces
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