Improvement of barrier performance in thin film encapsulation for organic light-emitting diodes by a prior planarization process

被引:0
作者
Qin, Cunping [1 ]
Yang, Jun [1 ]
Xu, Tao [2 ]
Ding, Xingwei [1 ]
Zhang, Jianhua [1 ]
机构
[1] Shanghai Univ, Sch Mech Engn & Automat, Shanghai, Peoples R China
[2] Shanghai Univ, Minist Educ, Key Lab Adv Display & Syst Applicat, Shanghai, Peoples R China
来源
2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT) | 2018年
关键词
Organic/inorganic hybrid barriers; Organic light-emitting diodes; Planarization process; Water vapor transmission rate; DEGRADATION; DEVICES; GROWTH;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The organic/inorganic hybrid barriers were fabricated to encapsulate the organic light-emitting diodes. Al2O3 as inorganic layer was deposited by atomic layer deposition (ALD) and polydimethoxysilane (PDMS) as organic layer was prepared by the spin-coating process. It was found that the optimized encapsulation structure with a prior planarization process had a better barrier performance with a lower water vapor transmission rate improved effectively from 4.95 x 10(-1) gm(-2) day(-1) of Al2O3/PDMS films to 7.30 x 10(-3) gm(-2) day(-1) of the hybrid PDMS/Al2O3/PDMS films at 60 degrees C and a relative humidity of 90% and a longer luminance decay time. These improvements were attributed to the surface planarization of encapsulation basement including the coverage of particles by the prior spin-coating process, reducing the defects of inorganic film in process, and the hydrophobic surface of the outermost polymer lowering the adsorption of water vapor.
引用
收藏
页码:780 / 784
页数:5
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