Atomic-level characterisation of the structure of amorphised GaAs utilising EXAFS measurements

被引:4
|
作者
Ridgway, MC
Glover, CJ
Foran, GJ
Yu, KM
机构
[1] Australian Natl Univ, Res Sch Phys Sci & Engn, Dept Elect Mat Engn, Canberra, ACT, Australia
[2] Australian Nucl Sci & Technol Org, Menai, NSW 2234, Australia
[3] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
关键词
GaAs; amorphous GaAs; extended X-ray absorption fine structure; EXAFS; ion implantation;
D O I
10.1016/S0168-583X(98)00588-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Extended X-ray absorption fine structure (EXAFS) analysis has been used to determine the structural parameters of stoichiometric, amorphised GaAs. Relative to a crystalline sample, the nearest-neighbor bond length and Debye-Waller factor both increased for amorphous material. In contrast, the coordination numbers about both Ga and As atoms in the amorphous phase decreased to similar to 3.85 atoms from the crystalline value of four. Similar trends were evident for amorphised Ge excluding the coordination number which did not deviate from the crystalline value. The structural parameters of amorphised GaAs and Ge have been discussed in terms of the multi- and mono-elemental nature, respectively, of the two materials. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:148 / 154
页数:7
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