Phonon scattering related to oxygen precipitation in Cz-silicon

被引：4

作者：

Zeller, F ^{[1
]}

Lassmann, K ^{[1
]}

Eisenmenger, W ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Phys 1, D-70550 Stuttgart, Germany

来源：

PHYSICA B | 1999年 / 263卷

关键词：

phonon spectroscopy; FTIR spectroscopy; oxygen precipitates; silicon;

D O I：

10.1016/S0921-4526(98)01204-6

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Using acoustic phonon spectroscopy with superconducting tunnelling junctions we have investigated the phonon scattering due to oxygen precipitation in heat-treated silicon samples with different organ and carbon contents. The results are compared to the infrared absorption of these samples. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：108 / 110

页数：3

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