Ultrahigh Sensitivity of a Plasmonic Pressure Sensor with a Compact Size

被引：30

作者：

Chou Chao, Chung-Ting ^{[1
]}

Chou Chau, Yuan-Fong ^{[2
]}

Chen, Sy-Hann ^{[3
]}

Huang, Hung Ji ^{[4
]}

Lim, Chee Ming ^{[2
]}

Kooh, Muhammad Raziq Rahimi ^{[2
]}

Thotagamuge, Roshan ^{[2
]}

Chiang, Hai-Pang ^{[1
]}

机构：

[1] Natl Taiwan Ocean Univ, Dept Optoelect & Mat Technol, Keelung 20224, Taiwan

[2] Univ Brunei Darussalam, Ctr Adv Mat & Energy Sci, Tungku Link, BE-1410 Gadong, Bandar Seri Beg, Brunei

[3] Natl Chiayi Univ, Dept Electrophys, Chiayi 600, Taiwan

[4] Taiwan Instrument Res Inst, Natl Appl Res Labs, Hsinchu 300, Taiwan

来源：

NANOMATERIALS | 2021年 / 11卷 / 11期

关键词：

metal-insulator-metal; pressure sensor; multiple modes; finite element method; nanophotonic; PHOTONIC CRYSTAL FIBER; METAL WAVE-GUIDE; FANO RESONANCE; FABRICATION; DESIGN; CAVITY; FILTER;

D O I：

10.3390/nano11113147

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This study proposes a compact plasmonic metal-insulator-metal pressure sensor comprising a bus waveguide and a resonator, including one horizontal slot and several stubs. We calculate the transmittance spectrum and the electromagnetic field distribution using the finite element method. When the resonator's top layer undergoes pressure, the resonance wavelength redshifts with increasing deformation, and their relation is nearly linear. The designed pressure sensor possesses the merits of ultrahigh sensitivity, multiple modes, and a simple structure. The maximum sensitivity and resonance wavelength shift can achieve 592.44 nm/MPa and 364 nm, respectively, which are the highest values to our knowledge. The obtained sensitivity shows 23.32 times compared to the highest one reported in the literature. The modeled design paves a promising path for applications in the nanophotonic field.

引用

页数：14

共 82 条

[1] Tunneling Plasmonics: Vacuum Rabi Oscillations in Carbon Nanotube Mediated Electromigrated Nanojunctions [J].