Self-Aligned Coplanar a-IGZO TFTs and Application to High-Speed Circuits

被引:149
作者
Kang, Dong Han [1 ,2 ]
Kang, In [1 ,2 ]
Ryu, Sang Hyun [1 ,2 ]
Jang, Jin [1 ,2 ]
机构
[1] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea
[2] Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea
关键词
Amorphous indium-gallium-zinc-oxide (a-IGZO); coplanar; ring oscillator (RO); self-aligned process; thin-film transistor (TFT); THIN-FILM TRANSISTORS; GA-ZN-O; RESISTANCE;
D O I
10.1109/LED.2011.2161568
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a self-aligned coplanar amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) using an a-IGZO/SiO2 stack layer. From the channel-length dependence of the total resistance for the TFTs, the channel and parasitic resistances were found to be 8.4 k Omega/mu m and 9.7 k Omega/sq, respectively. The fabricated a-IGZO TFT exhibits field-effect mobility of 23.3 cm(2)/V . s, threshold voltage of 3.6 V, and gate voltage swing of 203 mV/dec. A 23-stage ring oscillatormade of the self-aligned TFTs exhibits a propagation delay time of 17 ns/stage at a supply voltage of 22 V.
引用
收藏
页码:1385 / 1387
页数:3
相关论文
共 50 条
  • [41] Fabrication of Zinc Tin Oxide TFTs by Self-Aligned Imprint Lithography (SAIL) on Flexible Substrates
    Jackson, Warren
    Taussig, Carl
    Elder, Rich
    Tong, William M.
    Hoffman, Randy
    Emery, Tim
    Smith, Dan
    Koch, Tim
    2009 SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS, VOL XL, BOOKS I - III, 2009, : 873 - +
  • [42] Self-aligned offset gate poly-Si TFTs using photoresist trimming technology
    Wang LongYan
    Sun Lei
    Han DeDong
    Wang Yi
    Chan ManSun
    Zhang ShengDong
    SCIENCE CHINA-INFORMATION SCIENCES, 2015, 58 (04) : 1 - 6
  • [43] High-performance sol-gel processed a-IGZO TFTs with low-melting point metal electrodes
    He, Han
    Huang, Hao
    Peng, Chuan
    Liu, Guanshun
    Liu, Jiajie
    Duan, Sili
    Zou, Bingsuo
    Wan, Da
    JOURNAL OF MATERIALS CHEMISTRY C, 2024, 12 (02) : 607 - 613
  • [44] High-Performance Flexible a-IGZO TFTs Adopting Stacked Electrodes and Transparent Polyimide-Based Nanocomposite Substrates
    Chien, Chih-Wei
    Wu, Cheng-Han
    Tsai, Yu-Tang
    Kung, Yen-Cheng
    Lin, Chang-Yu
    Hsu, Po-Ching
    Hsieh, Hsing-Hung
    Wu, Chung-Chih
    Yeh, Yung-Hui
    Leu, Chyi-Ming
    Lee, Tzong-Ming
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (05) : 1440 - 1446
  • [45] Cherry-Hooper Amplifiers with 33 dB Gain at 400 kHz BW and 10 dB Gain at 3.5 MHz BW in Flexible Self-Aligned a-IGZO TFT Technology
    Shabanpour, R.
    Meister, T.
    Ishida, K.
    Boroujeni, B. Kheradmand
    Carta, C.
    Joerges, U.
    Ellinger, F.
    Petti, L.
    Muenzenrieder, N.
    Salvatore, G. A.
    Troester, G.
    2014 INTERNATIONAL SYMPOSIUM ON INTELLIGENT SIGNAL PROCESSING AND COMMUNICATION SYSTEMS (ISPACS), 2014, : 271 - 274
  • [46] Self-Aligned Top-Gate IGZO TFT With Stepped Structure for Suppressing Short Channel Effect
    Lee, Jin Kyu
    An, Soobin
    Lee, Soo-Yeon
    IEEE ELECTRON DEVICE LETTERS, 2023, 44 (11) : 1845 - 1848
  • [47] High-performance ITO/a-IGZO heterostructure TFTs enabled by thickness-dependent carrier concentration and band alignment manipulation
    Park, Chan-Yong
    Jeon, Seong-Pil
    Park, Joon Bee
    Park, Hun-Bum
    Kim, Dong-Hyuk
    Yang, Seong Hwan
    Kim, Gahye
    Jo, Jeong-Wan
    Oh, Min Suk
    Kim, Myunggil
    Kim, Yong-Hoon
    Park, Sung Kyu
    CERAMICS INTERNATIONAL, 2023, 49 (04) : 5905 - 5914
  • [48] Amorphous Indium-Gallium-Zinc-Oxide TFTs Patterned by Self-Aligned Photolithography Overcoming the GHz Threshold
    Tueckmantel, Christian
    Kalita, Utpal
    Haeger, Tobias
    Theisen, Manuel
    Pfeiffer, Ullrich
    Riedl, Thomas
    IEEE ELECTRON DEVICE LETTERS, 2020, 41 (12) : 1786 - 1789
  • [49] Performance dependence of self-aligned dual-gate poly-Si TFTs on localized defective regions
    Hsu, Chih-Chieh
    Li, Jin-Xian
    Chen, Po-Tsung
    Joodaki, Mojtaba
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2020, 35 (08)
  • [50] Single-grain Si TFTs for high-speed flexible electronics
    Ishihara, Ryoichi
    Chen, Tao
    van der Zwan, Michiel
    He, Ming
    Schellevis, H.
    Beenakker, Kees
    ADVANCES IN DISPLAY TECHNOLOGIES AND E-PAPERS AND FLEXIBLE DISPLAYS, 2011, 7956