Overlay accuracy on a flexible web with a roll printing process based on a roll-to-roll system

被引:31
作者
Chang, Jaehyuk [1 ]
Lee, Sunggun [2 ]
Lee, Ki Beom [1 ]
Lee, Seungjun [2 ]
Cho, Young Tae [3 ]
Seo, Jungwoo [2 ]
Lee, Sukwon [2 ]
Jo, Gugrae [1 ]
Lee, Ki-Yong [1 ]
Kong, Hyang-Shik [1 ]
Kwon, Sin [4 ]
机构
[1] Samsung Display, Nongseo Dong 446711, Yongin, South Korea
[2] Samsung Elect, Samsungjeonja Ro 445701, Hwaseong, South Korea
[3] Changwon Natl Univ, Changwondaehak Ro 641773, Changwon, South Korea
[4] Korea Inst Machinery & Mat, Taejon 305343, South Korea
关键词
LINE; FABRICATION; PARAMETERS; DESIGN;
D O I
10.1063/1.4921495
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
For high-quality flexible devices from printing processes based on Roll-to-Roll (R2R) systems, overlay alignment during the patterning of each functional layer poses a major challenge. The reason is because flexible substrates have a relatively low stiffness compared with rigid substrates, and they are easily deformed during web handling in the R2R system. To achieve a high overlay accuracy for a flexible substrate, it is important not only to develop web handling modules (such as web guiding, tension control, winding, and unwinding) and a precise printing tool but also to control the synchronization of each unit in the total system. A R2R web handling system and reverse offset printing process were developed in this work, and an overlay between the 1st and 2nd layers of +/- 5 mu m on a 500 mm-wide film was achieved at a sigma level of 2.4 and 2.8 (x and y directions, respectively) in a continuous R2R printing process. This paper presents the components and mechanisms used in reverse offset printing based on a R2R system and the printing results including positioning accuracy and overlay alignment accuracy. (C) 2015 AIP Publishing LLC.
引用
收藏
页数:8
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