Ion-beam assisted self-assembly of metallic nanostructures

被引：6

作者：

Chalapat, K. ^{[1
]}

Chekurov, N. ^{[2
]}

Li, J. ^{[1
]}

Paraoanu, G. S. ^{[1
]}

机构：

[1] Aalto Univ, Low Temp Lab, Helsinki 00076, Finland

[2] Aalto Univ, Dept Micro & Nanosci, Helsinki 00076, Finland

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2012年 / 272卷

关键词：

Self assembly; Focused ion beam; Metal thin film; Three dimensional nanostructures; STRESS; FIB;

D O I：

10.1016/j.nimb.2011.01.065

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we discuss how ion-beam techniques can be used to accurately direct the self-assembly of metallic nanostructures. Fabrication of micrometer-scale three-dimensional cubes (boxes) is demonstrated. The milling by ion-beam locally modifies the thickness of the film and its structures such as grains boundaries, film surface, and film/vacuum interface. The local manipulation can be done according to a design, either at once (parallel), or in a sequence within an electron/ion (SEM/FIB) dual-beam microscope. (C) 2011 Elsevier B.V. All rights reserved.

引用

收藏

页码：202 / 205

页数：4

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