Structural and electrical properties of Schottky barriers on n-GaN

被引:23
作者
Kalinina, EV [1 ]
Kuznetsov, NI [1 ]
Babanin, AI [1 ]
Dmitriev, VA [1 ]
Shchukarev, AV [1 ]
机构
[1] MEKHANOBR ANALYT CO,ST PETERSBURG 199026,RUSSIA
关键词
GaN; Schottky barrier; effective Richardson coefficient; Interface;
D O I
10.1016/S0925-9635(97)00115-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Cr, Au and Ni Schottky barriers were formed on n-GaN. Fundamental parameters of the barriers (barrier height, electron affinity of GaN, and effective Richardson coefficient) were calculated from results of current-voltage and capacitance-voltage measurements. Interface chemistry of Cr, Au and Ni barriers on n-GaN was studied using Auger electron spectroscopy (AES) and angle-resolved X-ray photoelectron spectroscopy (AR XPS). A correlation between the chemical reactivity of metals and the value of the effective Richardson coefficient was established. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:1528 / 1531
页数:4
相关论文
共 8 条
[1]  
Chastain J., 1992, Handbook of x-ray photoelectron spectroscopy, P261
[2]  
DUBROVENSKY SN, 1994, 8 INT C QUANT SURF A, P70
[3]   STUDY OF SCHOTTKY BARRIERS ON N-TYPE GAN GROWN BY LOW-PRESSURE METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].
GUO, JD ;
FENG, MS ;
GUO, RJ ;
PAN, FM ;
CHANG, CY .
APPLIED PHYSICS LETTERS, 1995, 67 (18) :2657-2659
[4]   Schottky barriers on n-GaN grown on SiC [J].
Kalinina, EV ;
Kuznetsov, NI ;
Dmitriev, VA ;
Irvine, KG ;
Carter, CH .
JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (05) :831-834
[5]  
KHAN MRH, 1994, T 2 INT HIGH TEMP EL, P231
[6]  
Rhoderick E.H., 1978, Metal Semiconductors Contacts
[7]  
SCHMITZ C, 1996, MATER RES SOC S P, V395, P837
[8]  
WANG L, 1995, EMC37, pA32