Diagnostics of an RF plasma flash evaporation process using the monochromatic imaging technique

The high densities and high gas temperature of rf plasmas at pressures near 1 nan are favorable for the development of plasma sources capable of evaporating solid precursors in the plasma zone. In the cooler region downstream of the plasma, the evaporated material condenses to nanoparticles and/or coatings. The complete evaporation of precursors injected into a thermal plasma depends on plasma and precursor parameters and is studied in this paper. Since man!: parameters contribute to the evaporation, fast experimental techniques are necessary to carry out a systematic study of the evaporation process. The monochromatic imaging technique applied in this,work rises an intensified CCB camera with optical fillers for the detection gf characteristic plasma emission lines. The high spatial and temporal resolution of this technique results in a detailed picture of plasma emission and particle evaporation for different process parameters. These results are compared to model calculations for particle evaporation.