Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors

被引：34

作者：

Socher, E ^{[1
]}

Degani, O ^{[1
]}

Nemirovsky, Y ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Elect Engn, Kidron Microelect Res Ctr, IL-32000 Haifa, Israel

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 71卷 / 1-2期

关键词：

thermopiles; sensor modeling; design optimization; microsystems;

D O I：

10.1016/S0924-4247(98)00179-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper presents a new optimization methodology for integrated thermoelectric sensors. A steady-state and time-dependent analytical model of the signal and noise of the microsystem is presented and the figures of merit of the microsystem are defined. A qualitative and quantitative study of the system performance is conducted with respect to ambient pressure, the number of thermocouples and conducting lead width. A design chart for the sensors' optimization is presented, through which the performance envelope is defined with respect to the NEP (noise equivalent power) and the time constant of the microsystem. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：107 / 115

页数：9

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