The structure and properties of barium strontium titanate films prepared by medium frequency magnetron sputtering

被引：0

作者：

Liao Jiaxuan ^{[1
]}

Li Enqiu ^{[1
]}

Tian Zhong ^{[1
]}

Xu Jiang ^{[1
]}

Yang Haiguang ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, Chengdu 610054, Peoples R China

来源：

RARE METAL MATERIALS AND ENGINEERING | 2007年 / 36卷

关键词：

barium strontium titanate film; medium frequency magnetron sputtering; perovskite structure;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ba0.6Sr0.4TiO3 films have been prepared by medium frequency magnetron sputtering, and crystallized in situ. The films are denoted as MF-BST films. XPS shows that the film surface composition and structure is Ba0.58Sr0.42Ti1.01O2.95, and mainly composed of perovskited BST phase. XRD exhibits that the BST films can be fully crystallized and shown preferential (111) orientation. Meanwhile, the film shows about 2 nm thick BST/Pt transition layer which contains a small amount of non-perovskited BST phase with a little TixPtyOz compound. AFM shows that the BST films are smooth and compact, which can prevent the adsorbed C/H contaminations from diffusing into two sides further, resulting in thin transition layer with a small quantity of non-perovskited BST phase. The film capacitor displays about 1200 dielectric constant and 10(-9) A/cm(2) level leakage current density. Compared to the BST films prepared by radio frequency magnetron sputtering and crystallized not-in situ, the MF-BST films exhibit more significant improvement both in structure and in dielectric property.

引用

页码：970 / 972

页数：3

共 11 条

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