Electromechanical fluidic coupled vibrations for micro film considering the van der Waals force

In this paper, a multi-fields coupled dynamic equation of the micro film is presented which includes mechanical force, the van der Waals force, electrostatic force and fluidic damping force. The multi-fields coupled free vibration of the micro film is investigated. The multi-fields coupled forced response of the micro film near natural frequency is analyzed. The multi-fields coupled natural frequencies of the micro film and their changes along with system parameters are discussed. Amplitude frequency characteristics of the micro film under the coupled fields are given.