Slab-Modulated Sidewall Bragg Gratings in Silicon-on-Insulator Ridge Waveguides

被引:46
作者
Jiang, Guomin [1 ]
Chen, Ruiyi [1 ]
Zhou, Qiang [1 ]
Yang, Jianyi [1 ]
Wang, Minghua [1 ]
Jiang, Xiaoqing [1 ]
机构
[1] Zhejiang Univ, Dept Informat Sci & Elect Engn, Hangzhou 310027, Peoples R China
关键词
Bragg scattering; gratings; ridge waveguide; silicon-on-insulator (SOI) technology;
D O I
10.1109/LPT.2010.2089613
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A slab-modulated sidewall Bragg grating realized by periodically structural corrugation in the sides of silicon slab is demonstrated on a silicon-on-insulator ridge waveguide. Based on this structure, narrow bandwidth can be accurately controlled by varying the distance between the slab grating region and the ridge with high fabrication tolerance. And low side lobes can also be conveniently achieved by changing the extent of sidewall grating teeth. Experimental results show that bandwidths of the example devices can be changed from 0.64 to 1.4 nm, which agree well with the simulated results.
引用
收藏
页码:6 / 8
页数:3
相关论文
共 12 条
[1]   Influence of sidelobes on fiber-bragg-grating-based Q-switched fiber laser [J].
Cheng, X. P. ;
Zhang, J. ;
Shum, P. ;
Tang, M. ;
Wu, R. F. .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2007, 19 (17-20) :1646-1648
[2]   GRATING FILTERS FOR THIN-FILM OPTICAL-WAVEGUIDES [J].
FLANDERS, DC ;
KOGELNIK, H ;
SCHMIDT, RV ;
SHANK, CV .
APPLIED PHYSICS LETTERS, 1974, 24 (04) :194-196
[3]   Numerical Survey on Bragg Reflectors in Silicon-on-Insulator Waveguides [J].
Giuntoni, I. ;
Krause, M. ;
Renner, H. ;
Bruns, J. ;
Gajda, A. ;
Brinkmeyer, E. ;
Petermann, K. .
2008 5TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, 2008, :285-287
[4]   Deep-UV Technology for the Fabrication of Bragg Gratings on SOI Rib Waveguides [J].
Giuntoni, Ivano ;
Stolarek, David ;
Richter, Harald ;
Marschmeyer, Steffen ;
Bauer, Joachim ;
Gajda, Andrzej ;
Bruns, Juergen ;
Tillack, Bernd ;
Petermann, Klaus ;
Zimmermann, Lars .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2009, 21 (24) :1894-1896
[5]   Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography [J].
Hastings, JT ;
Lim, MH ;
Goodberlet, JG ;
Smith, HI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06) :2753-2757
[6]   Fiber Bragg grating technology fundamentals and overview [J].
Hill, KO ;
Meltz, G .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (08) :1263-1276
[7]   All-silicon optoelectronic modulator with 1 GHz switching capability [J].
Irace, A ;
Breglio, G ;
Cutolo, A .
ELECTRONICS LETTERS, 2003, 39 (02) :232-233
[8]   Resonant waveguide device with vertical gratings [J].
Kim, Hyo-Chang ;
Ikeda, Kazuhiro ;
Fainman, Yeshaiahu .
OPTICS LETTERS, 2007, 32 (05) :539-541
[9]   COUPLING COEFFICIENTS FOR DISTRIBUTED FEEDBACK SINGLE-HETEROSTRUCTURE AND DOUBLE-HETEROSTRUCTURE DIODE LASERS [J].
STREIFER, W ;
SCIFRES, DR ;
BURNHAM, RD .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1975, 11 (11) :867-873
[10]   Cladding-modulated Bragg gratings in silicon waveguides [J].
Tan, D. T. H. ;
Ikeda, K. ;
Fainman, Y. .
OPTICS LETTERS, 2009, 34 (09) :1357-1359